Advanced edge inspection.
EyeEdge characterizes the edge (APEX and bevels) of the substrateĺs surface using the patented Altatech technology.
EyeEdge can also be configured according to specific applications.
- Detection of cracks, scratches, contamination areas and more
- Resolution < 2Ám
- Defect positioning better than 0.03░ on tangential axis and 50Ám on radial position
- Defect pictures reported for offline review
- Throughput guaranteed at 100 wafers/hour