NanoVision

AltaSight 300

EyeEdge

Compound

Advanced edge inspection.

EyeEdge characterizes the edge (APEX and bevels) of the substrate’s surface using the patented Altatech technology.

EyeEdge can also be configured according to specific applications.

Detection of cracks, scratches, contamination areas and more
Resolution < 2µm
Defect positioning better than 0.03° on tangential axis and 50µm on radial position
Defect pictures reported for offline review
Throughput guaranteed at 100 wafers/hour